Integration of optical grade wafer scale ferroelectric films in CMOS process flows
Stand IF8
14th May 2025
Scaling ferroelectric films for industrial applications requires overcoming challenges related to cost, throughput, and production volume. FFLOWS addresses these challenges with an innovative chemical solution-based process for fabricating optical grade ferroelectric films for photonic integrated circuits, including Pb(Zr,Ti)O₃ and BaTiO₃, at wafer scale. Currently, wafers up to 100 mm are available, with 200 mm wafers expected by spring 2026. The FFLOWS process offers a low-cost, high-throughput, and highly scalable approach, allowing for the facile integration of ferroelectric films into CMOS process flows.

